Overview and details of the sessions of this conference. Please select a date or location to show only sessions at that day or location. Please select a single session for detailed view (with abstracts and downloads if available).
Parylene as a Novel Material for Adhesive Bonding, Flexible Electronics and Wafer Level Packaging
Franz Selbmann1,2, Martin Kühn1,2, Frank Roscher1, Maik Wiemer1, Harald Kuhn1,3, Yvonne Joseph2
1Fraunhofer Institute for Electronic Nano Systems ENAS, Chemnitz, Germany; 2TU Bergakademie Freiberg, Institute of Nanoscale and Biobased Materials, Freiberg, Germany; 3TU Chemnitz, Center for Microtechnologies, Chemnitz, Germany
2:35pm - 3:00pm
Manufacturing and Characterization of Thin-Film Tantalum Pentoxide Integrated Capacitors
Andrei Costina1, Markus Wöhrmann1, Michael Schiffer1, Martin Schneider-Ramelow2