Conference Time: 23rd Nov 2024, 03:36:50pm CET
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AP4_Advances in WLP Technologies I
Time:
Thursday, 12/Sept/2024:
11:00am - 12:15pm
Session Chair: Rolf Aschenbrenner , Fraunhofer IZM
Location: MOA 5 MOA 5
Presentations
11:00am - 11:25am Semi-Additive Fine Pitch RDL Litho-Process Development of 1000nm CD Using low-NA 300mm i-line Stepper
Lili Wang , Murat Pak, Nelson Pinho, John Slabbekoorn, Andy Miller, Eric Beyne
IMEC, Belgium
11:25am - 11:50am Study of Cross-contamination in Multi-chamber PVD Systems used for High-throughput Seed Layer Deposition
Patrik Carazzetti 1 , Carl Drechsel1 , Roland Rettenmeier1 , Jürgen Weichart1 , Kay Viehweger2 , Ewald Strolz1
1 Evatec AG, Truebbach, Switzerland; 2 Fraunhofer IZM-ASSID, Moritzburg, Germany
11:50am - 12:15pm Enhanced Defect Detection with Deep Neural Networks Post Wafer Bonding
Fiete Stoll , Vikas Dubey, Dirk Wünsch, Frank Roscher, Maik Wiemer
Fraunhofer ENAS, Chemnitz, Germany
