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1Sumitomo Electric Industries, Ltd., Yokohama, Japan; 2Tokyo Institute of Technology, Tokyo, Japan
5:50pm - 6:15pm
Advanced Ultrathin Spray Coating Process Technology for Heterogeneous Integration Applications
Johanna Rimboeck1, Stefan Ertl1, Prasanna Ramaswamy2, Alex Farrell2, Ali Uzun5, Mariana Pires1, Brian Corbett3, Ruggero Loi2, Ksenija Varga1, Peter Ossieur4
1EV Group, Florian am Inn, Austria; 2X-Celeprint Limited, Cork, Ireland; 3Tyndall National Institute, Cork, Ireland; 4IDLab, INTEC, Ghent University - imec, Ghent, Belgium; 5Photonics Research Group, INTEC, Ghent University - imec, Ghent, Belgium