5:00pm - 5:25pmTuning of Copper Grain Size for Integration in Hybrid Bonding Applications
Sarabjot Singh, Kathleen Dunn
University at Albany, State University of New York, New York, USA
5:25pm - 5:50pmFine Pitch Aluminum Hybrid Bonding at Wafer Level: Overcoming the Challenges in Plating, Passivation and Planarization
Imants Cirulis, Vikas Dubey, Silvia Braun, Dirk Wünsch, Maik Wiemer
Fraunhofer ENAS, Chemnitz, Germany
5:50pm - 6:15pmSurface Activated Bonding for Hybrid and All-metal 3D (AM3D) Interconnect
Tadatomo Suga1, Kanji Otsuka1, Junsha Wang1,2
1Meisei University, Hino, Japan; 2The University of Tokyo Tokyo, Japan
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